This RACK type vacuum evaporator has three individually controlled
thermal sources for sequential and co-evaporation. Three separate power supplies
offer 150A or 200A current intensity for the evaporation of large
quantities of metals or other materials for the production of thin and
thick films.
The tall vacuum chamber, from stainless steel or glass, and the excellent
geometry of the system, support the creation of thin films of metals or
other materials on your samples, placed on the supplied substrate holder,
with high uniformity, min 95% on dia=10cm substrate, or min 92% on the
optional dia=20cm substrate.
The compact RACK type unit incorporates:
- THREE separate thermal sources with
(6x) high current OFHC cooper feedthroughs
for sequential or co-evaporation
- High grade aluminum base plate with
(3x) 1 inch ports free
- Vacuum chamber pumping port, NW 100,
with protection grid
- High vacuum TURBO pump (80l/s - 100l/s)
- TURBO pump protection well
- FULL informative TURBO pump controller for
detailed information and full control on Turbo
pump parameters
- 1000 - 5.0x10-9 hPa Pirani-Penning
Vacuum Measuring System
with:
Pirani - Cold Plasma Penning compact head
FULL informative controller for Pirani - Cold
Plasma Penning head
- Stainless steel vacuum chamber with large
glass window. The cahmber has dia=30cm
and high=45cm. A manual lifting mechanism
used for the movement of the chamber
-
SQM-160, 2ch quartz crystal thickness
monitoring system with one water cooled
crystal head
- Heating power control unit (PCU) with:
3x high current AC power supply
150A continuous (200A short time)
3x 0-100% filament or boat current control
3x current meter
3x power protection Interlock
Max filament temperature 1800 Celsius
(Tungsten)
- Substrate holder, Stainless steel, circular
form with dia=10cm with sample
holders
- Substrate holder stereotactic system, 4 rods,
circular rod holder, Stainless
Steel
- Adjustable source -
Substrate holder distance,
min=15cm
- Manual shutter with adjustable shutter position
- Vent valve (manual)
- Wet type rough pump, with pumping speed
80l/min and ultimate vacuum
5.0x10-3 hPa
- Primary pump (rough pump), control switch,
pperation indicator, power socket
- Water line connectors (input-output)
- Water line interlock
- Power 110/220 Vac - 50/60Hz
VCM 600_SP3_Glass
This system has the same specifications as above and delivered with
glass vacuum chamber without lifting mechanism, to cover lower budgets.
The glass bell jar is made from ultra high quality
borosilicate glass, manufactured under very strict specifications
A bell jar protection metallic cover (grid)
supplied
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VCM600_SP3_SS
Three separate thermal sources
VCM600_SP3_Glass
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